Silicon micromechanical resonator with thick-film printed vibration excitation and detection mechanisms-Reference-Cited by-同舟云学术

Silicon micromechanical resonator with thick-film printed vibration excitation and detection mechanisms

Published:2001-01 Issue:3 Volume:88 Page:189-197
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Beeby S.P.,White N.M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. A novel micropump design with thick-film piezoelectric actuation;Koch;Meas. Sci. Technol.,1997

2. Thick-film printing of PZT onto silicon;Maas;Mater. Lett.,1997

3. N. Harris, M. Koch, S. Beeby, N.M. White, A.G.R. Evans, Thick-film printing of PZT onto silicon for micromechanical applications, in: Proceedings of the 9th Micromechanics Europe Workshop, Ulvik, Norway, 3–5 June 1998, pp. 78–81.

4. Processing of PZT piezoelectric thick films on silicon for Microelectromechanical systems;Beeby;J. Micromech. Microeng.,1999

5. A novel thick-film PZT/micromachined silicon accelerometer;Beeby;Electron. Lett.,1999

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