The application of thick-film technology in C-MEMS-Reference-Cited by-同舟云学术

The application of thick-film technology in C-MEMS

Published:2007-02-24 Issue:4 Volume:19 Page:363-368
ISSN:1385-3449
Container-title:Journal of Electroceramics
language:en
Short-container-title:J Electroceram

Author:

Belavic Darko,Hrovat Marko,Holc Janez,Zarnik Marina Santo,Kosec Marija,Pavlin Marko

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Materials Chemistry,Mechanics of Materials,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s10832-007-9064-z.pdf

Reference23 articles.

1. N. Maluf, K. Williams, An Introduction to Microelectromechanical System Engineering, (Artech House, Norwood, 2004)

2. D. Belavič, S. Šoba, M. Hodnik, M. Pavlin, S. Gramc, M. Hrovat, Low-cost force sensor for an electronic scale, Inf. MIDEM 27, 172–176 (1997)

3. R. Del’Acqua, Sensors: a great chance for microelectronic technologies, Inf. MIDEM 24, 248–257 (1994)

4. N.M. White, J.D. Turner, Thick film sensors: past, present and future. Meas. Sci. Technol. 8, 1–20 (1997)

5. D. Belavič, M. Hrovat, M. Pavlin, M. Santo Zarnik, Thick-film technology for sensor applications, Inf. MIDEM 33, 45–48 (2003)

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