Author:
Palov A. P.,Mankelevich Yu. A.,Rakhimova T. V.,Shamiryan D.
Subject
Physics and Astronomy (miscellaneous),Condensed Matter Physics
Reference26 articles.
1. D. Zhang and M. Kushner, J. Appl. Phys. 87, 1060 (2000).
2. D. Economou, Thin Solid Films 365, 348 (2000).
3. T. Yagisawa, K. Maeshige, T. Shimada, and T. Makabe, IEEE Trans. Plasma Sci. 32, 90 (2004).
4. Y. Yoshida and T. Watanabe, in Proceedings of the 5th Symposium on Dry Process, Tokyo, 1983, p. 4.
5. K. Hashimoto, Jpn. J. Appl. Phys. 32, 6109 (1993).
Cited by
9 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献