Prediction of a Radial Variation of Plasma Structure and Ion Distributions in the Wafer Interface in Two-Frequency Capacitively Coupled Plasma-Reference-Cited by-同舟云学术

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Prediction of a Radial Variation of Plasma Structure and Ion Distributions in the Wafer Interface in Two-Frequency Capacitively Coupled Plasma

Published:2004-02 Issue:1 Volume:32 Page:90-100
ISSN:0093-3813
Container-title:IEEE Transactions on Plasma Science
language:en
Short-container-title:IEEE Trans. Plasma Sci.

Author:

Yagisawa T.,Maeshige K.,Shimada T.,Makabe T.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Condensed Matter Physics,Nuclear and High Energy Physics

Link

http://xplorestaging.ieee.org/ielx5/27/28766/01291608.pdf?arnumber=1291608

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