Surface kinetics and plasma equipment model for Si etching by fluorocarbon plasmas
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.371980
Reference31 articles.
1. Comparison of advanced plasma sources for etching applications. V. Polysilicon etching rate, uniformity, profile control, and bulk plasma properties in a helical resonator plasma source
2. Remote plasma etching of silicon nitride and silicon dioxide using NF3/O2 gas mixtures
3. Kinetics of etch products and reaction process in electron cyclotron resonance plasma etching of Si
4. Influence of reactor wall conditions on etch processes in inductively coupled fluorocarbon plasmas
5. High density fluorocarbon etching of silicon in an inductively coupled plasma: Mechanism of etching through a thick steady state fluorocarbon layer
Cited by 61 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Process stability of SiO2 atomic layer etching in C4F6/Ar chemistry;Journal of Vacuum Science & Technology A;2024-09-13
2. Tunable metamaterials with carrier-induced effective permittivity for active control of electromagnetic fields in semiconductor manufacturing device;Plasma Sources Science and Technology;2024-06-01
3. The role of nitrogen addition in C4F8/Ar plasma to modulate the plasma process from polymerization to etching;Vacuum;2023-10
4. A new global model with two electron groups for weakly ionized argon discharges at low pressure;Plasma Sources Science and Technology;2023-02-01
5. Quantitative Analysis of Mass Spectrometric Signals for the Estimation of Fluorine Radical Densities in CF4 and CF4/O2 Plasmas;Plasma Chemistry and Plasma Processing;2022-05-25
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3