Use of hexamethylcyclotrisilazane for preparation of transparent films of complex compositions
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Published:2009-06
Issue:3
Volume:35
Page:274-283
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ISSN:1087-6596
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Container-title:Glass Physics and Chemistry
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language:en
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Short-container-title:Glass Phys Chem
Author:
Fainer N. I.,Golubenko A. N.,Rumyantsev Yu. M.,Maximovskii E. A.
Publisher
Pleiades Publishing Ltd
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites
Reference14 articles.
1. Fainer, N.I., Kosinova, M.L., Rumyantsev, Yu.M., Maximovskii, E.A., and Kuznetsov, F.A., Thin Silicon Carbonitride Films Are Perspective Low-K Materials, J. Phys. Chem. Solids, 2008, vol. 69, nos. 2–3, pp. 661–668. 2. Ting, S.F., Fang, Y.K., Hsien, W.T., Trsair, Y.S., Chang, C.-N., Lin, C.S., Hsieh, M.C., Chiang, H.C., and Ho, J.J., Heteroepitaxial Silicon-Carbide Nitride Films with Different Carbon Sources on Silicon Substrates Prepared by Rapid-Thermal Chemical-Vapor Deposition, J. Electron. Mater., 2002, vol. 31, no. 12, pp. 1341–1346. 3. Riedel, R., Mera, C., Hauser, R., and Klonszynski, A., Silicon-Based Polymer-Derived Ceramics: Synthesis Properties and Application—A Review, Yogyo Kyokaishi (J. Ceram. Soc. Jpn.), 2006, vol. 114, no. 6, pp. 425–444. 4. Fainer, N.I., Kosinova, M.L., Rumyantsev, Yu.M., and Kuznetsov, F.A., RPECVD Thin Silicon Carbonitride Films Using Hexamethyldisilazane, J. Phys. IV, 1999, vol. 9, pp. Pr8-769–Pr8-775. 5. Golubenko, A.N., Kosinova, M.L., Titov, V.A., Titov, A.A., and Kuznetsov, F.A., On Thermodynamic Equilibria of Solid BN and Gas Phases in the B-N-H-Cl-He System, Thin Solid Films, 1997, vol. 293, pp. 11–16.
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1. Generalized CVD Diagram of the Si–C–N–H–Не(Ar) System;Russian Journal of Inorganic Chemistry;2020-06 2. Deposition of Films from a Mixture of Hexamethylcyclotrisilazane Vapor and Argon in Inductively Coupled Plasma;Glass Physics and Chemistry;2019-11 3. Physicochemical Properties and Structure of SiCxNy:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane;Journal of Structural Chemistry;2018-12 4. Synthesis of Hydrogenated Silicon Oxycarbonitride from a Gas Mixture of Methyltris(Diethylamino)Silane, Nitrogen, and Oxygen;Glass Physics and Chemistry;2018-11 5. Synthesis of two aminosilanes as CVD precursors of SiCxNyfilms: Tuning film composition by Molecular Structures;Phosphorus, Sulfur, and Silicon and the Related Elements;2018-04-19
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