Deposition of Films from a Mixture of Hexamethylcyclotrisilazane Vapor and Argon in Inductively Coupled Plasma
Author:
Publisher
Pleiades Publishing Ltd
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites
Link
https://link.springer.com/content/pdf/10.1134/S108765961906018X.pdf
Reference39 articles.
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2. Ooi, P.C., Wee, M.F.M.R., Dee, Ch.F., Yap, Ch.Ch., Salleh, M.M., and Majlis, B.Y., Fabrication of transparent bistable switching memory device using plasma polymerized hexamethyldisiloxane layers with embedded graphene quantum dots, Thin Solid Films, 2018, vol. 645, pp. 45–50.
3. Yan, X., Li, J., and Yi, L., Fabrication of pH-responsive hydrophilic/hydrophobic Janus cotton fabric via plasma-induced graft polymerization, Mater. Lett., 2017, vol. 208, pp. 46–49.
4. Wróbel, A.M. and Kryszewski, M., Preparation, structure, and some properties of organosilicon thin polymer films obtained by plasma polymerization, Prog. Colloid Polym. Sci., 1991, vol. 85, pp. 91–101.
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1. Controlling of Chemical Bonding Structure, Wettability, Optical Characteristics of SiCN:H (SiC:H) Films Produced by PECVD Using Tetramethylsilane and Ammonia Mixture;Coatings;2023-01-30
2. Synthesis, Properties and Aging of ICP-CVD SiCxNy:H Films Formed from Tetramethyldisilazane;Coatings;2022-01-11
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