Thin silicon carbonitride films are perspective low-k materials
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Reference8 articles.
1. Synthesis of amorphous silicon carbonitride films by pulsed laser deposition;Boughaba;Thin Solid Films,2002
2. Dependence of optical properties and hardness on carbon content in silicon carbonitride films deposited by plasma ion immersion processing technique;Afanasyev-Charkin;Nucl. Instrum. Methods B,2003
3. Structural characterization of amorphous SiCN chemical vapour deposition;Bendeddouche;J. Appl. Phys.,1997
4. Stability of silicon carbonitride phases;Badzian;J. Am. Ceram. Soc.,2002
5. Synthesis of nanocrystalline silicon carbonitride films by remote plasma enhanced chemical vapor deposition using the mixture of hexamethyldisilazane with helium and ammonia;Fainer;J. Crys. Growth,2003
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