Collisionless Bounce Resonance Heating in Dual-Frequency Capacitively Coupled Plasmas-Reference-Cited by-同舟云学术

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Collisionless Bounce Resonance Heating in Dual-Frequency Capacitively Coupled Plasmas

Published:2011-07-27 Issue:5 Volume:107 Page:
ISSN:0031-9007
Container-title:Physical Review Letters
language:en
Short-container-title:Phys. Rev. Lett.

Author:

Liu Yong-Xin,Zhang Quan-Zhi,Jiang Wei,Hou Lu-Jing,Jiang Xiang-Zhan,Lu Wen-Qi,Wang You-Nian

Publisher

American Physical Society (APS)

Subject

General Physics and Astronomy

Link

http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevLett.107.055002/fulltext

Reference16 articles.

1. Principles of Plasma Discharges and Materials Processing

2. From Fermi acceleration to collisionless discharge heating

3. Evolution of the electron-energy-distribution function during rf discharge transition to the high-voltage mode

4. Collisionless Heating in Capacitive Discharges Enhanced by Dual-Frequency Excitation

5. Mode Transition Induced by Low-Frequency Current in Dual-Frequency Capacitive Discharges

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3. Kinetic behavior of secondary electrons in a magnetized voltage-driven discharge using combined rf/dc sources;Physica Scripta;2024-04-11

4. Numerical investigation on the ion-neutral relaxation phenomenon of ion emission from plasma sheath at atmospheric pressure;AIP Advances;2024-04-01

5. Effects of magnetic field gradient on capacitively coupled plasma driven by tailored voltage waveforms;Journal of Vacuum Science & Technology A;2024-03-22

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