1. Microsystem and Terahertz Research Center
2. Institute of Electronic Engineering
3. China Academy of Engineering Physics
4. Chengdu 610200
5. China
6. Institute of Semiconductors
7. Chinese Academy of Sciences
8. Beijing 100083
9. University of Chinese Academy of Sciences
10. Department of physics
11. School of Science
12. Wuhan University of Technology
13. Wuhan 430070