Reducing the reverse leakage current of AlGaN/GaN heterostructures via low-fluence neutron irradiation

Author:

Wang Rong12345ORCID,Xu Jianxing12345,Zhang Shiyong12345,Zhang Ying12345,Zheng Penghui12345,Cheng Zhe67859,Zhang Lian67859,Chen Feng-Xiang101112135,Tong Xiaodong12345,Zhang Yun67859,Tan Wei12345

Affiliation:

1. Microsystem and Terahertz Research Center

2. Institute of Electronic Engineering

3. China Academy of Engineering Physics

4. Chengdu 610200

5. China

6. Institute of Semiconductors

7. Chinese Academy of Sciences

8. Beijing 100083

9. University of Chinese Academy of Sciences

10. Department of physics

11. School of Science

12. Wuhan University of Technology

13. Wuhan 430070

Abstract

We demonstrate that low-fluence neutron irradiation can be a promising way to reduce the reverse leakage current of AlGaN/GaN heterostructures grown by MOCVD on sapphire substrates while maintaining other electronic properties almost unchanged.

Funder

Science Challenge Project

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

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