Affiliation:
1. Xi'an University of Technology, Xi'an, Shaanxi, 710048, China
Abstract
Silicon carbide (SiC) surface modification is an essential step in chemical mechanical polishing. For high quality and high efficiency surface modification of SiC, a green and promising surface modification method named plasma electrochemical oxidation (PECO) is proposed.
Funder
National Natural Science Foundation of China
Natural Science Foundation of Shaanxi Province
Shanxi Provincial Key Research and Development Project
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Cited by
14 articles.
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