Study of damage mechanism on single crystal 4H-SiC surface layer by picosecond laser modification (PLM)
Author:
Publisher
Elsevier BV
Reference46 articles.
1. Silicon carbide integrated circuits for extreme environments;Kashyap;Wide Bandgap Power Dev. Appl. (Wipda),2013
2. C.R. L.d. Jiang, A review of silicon carbide development in MEMS applications, Int. J. Comput. Mater. Sci. Surf. Eng. 2(3-4) (2009) 227-242. doi: 10.1504/IJCMSSE.2009.027484.
3. Accelerated ICP etching of 6H-SiC by femtosecond laser modification;Huang;Appl. Surf. Sci.,2019
4. A novel approach to obtain near damage-free surface/subsurface in machining of single crystal 4H-SiC substrate using pure metal mediated friction;Wu;Appl. Surf. Sci.,2022
5. Competition between surface modification and abrasive polishing: a method of controlling the surface atomic structure of 4H-SiC (0001);Deng;Sci. Rep.,2015
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3