Application of ultrasonic sprayed zirconium oxide dielectric in zinc tin oxide-based thin film transistor

Author:

Oluwabi Abayomi T.12345ORCID,Katerski Atanas12345ORCID,Carlos Emanuel6789ORCID,Branquinho Rita6789ORCID,Mere Arvo12345,Krunks Malle12345ORCID,Fortunato Elvira6789ORCID,Pereira Luis6789ORCID,Oja Acik Ilona12345ORCID

Affiliation:

1. Laboratory of Thin Film Chemical Technologies

2. Department of Materials and Environmental Technology

3. Tallinn University of Technology

4. 19086 Tallinn

5. Estonia

6. CENIMAT/i3N Nova School of Science Technilogy (FCT-NOVA)

7. Universidade NOVA de Lisboa and CEMOP/Uninova

8. 2829-516 Caparica

9. Portugal

Abstract

A typical schematic for both spray pyrolysis set-up and ZrOx-based TFT device, and the corresponding electrical performance.

Funder

Tallinna Tehnikaülikool

European Regional Development Fund

Fundação para a Ciência e a Tecnologia

Horizon 2020 Framework Programme

Sihtasutus Archimedes

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

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