Process–property relationship in high-k ALD SrTiO3 and BaTiO3: a review-Reference-Cited by-同舟云学术

Process–property relationship in high-k ALD SrTiO3 and BaTiO3: a review

Published:2017 Issue:32 Volume:5 Page:8000-8013
ISSN:2050-7526
Container-title:Journal of Materials Chemistry C
language:en
Short-container-title:J. Mater. Chem. C

Author:

Shim J. H.¹²³⁴⁵,Choi H. J.¹²³⁴^ORCID,Kim Y.⁵⁶⁷⁸,Torgersen J.⁵⁶⁷⁸⁹,An J.¹⁰¹¹¹²⁴,Lee M. H.¹³¹⁴¹⁵⁸^ORCID,Prinz F. B.⁵⁶⁷⁸¹⁶

Affiliation:

1. School of Mechanical Engineering

2. Korea University

3. Seoul 02841

4. Korea

5. Department of Mechanical Engineering

6. Stanford University

7. Stanford

8. USA

9. Department of Engineering Design and Materials

10. Manufacturing Systems and Design Engineering (MSDE) Program

11. Seoul National University of Science and Technology

12. Seoul 01811

13. School of Engineering

14. University of California Merced

15. Merced

16. Department of Materials Science and Engineering

Abstract

This review addresses recent approaches for atomic layer deposition (ALD) that are closely related to the electrical properties of ultrathin SrTiO₃ and BaTiO₃ films.

Funder

National Research Foundation of Korea

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2017/TC/C6TC05158H

Reference139 articles.

1. Large-Area Optical Coatings with Uniform Thickness Grown by Surface Chemical Reactions for High-Power Laser Applications

2. Atomic layer epitaxy

3. Ultra-thin platinum catalytic electrodes fabricated by atomic layer deposition

4. Ultra-Low Thermal Conductivity in W/Al 2 O 3 Nanolaminates

5. A Kinetic Model for Step Coverage by Atomic Layer Deposition in Narrow Holes or Trenches

Cited by 59 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. In-situ crystallization of rutile-phased TiO2 via the template effect using MoO2 electrode for the metal-insulator-metal capacitor applications;Journal of Alloys and Compounds;2024-10

2. Emerging Capacitive Materials for On-Chip Electronics Energy Storage Technologies;Batteries;2024-09-07

3. SrTiO₃ and (Ba,Sr)TiO₃ Films Epitaxially Grown on SrRuO₃ Using Atomic Layer Deposition;ACS Applied Materials & Interfaces;2024-09-06

4. Low temperature crystallization of atomic-layer-deposited SrTiO3 films with an extremely low equivalent oxide thickness of sub-0.4 nm;Applied Surface Science;2024-08

5. Tungsten-bronze-type BaNd2Ti4O12 ceramics with high permittivity and ultra-low dielectric loss under low frequency;Ceramics International;2024-08