SrTiO3 and (Ba,Sr)TiO3 Films Epitaxially Grown on SrRuO3 Using Atomic Layer Deposition-Reference-Cited by-同舟云学术

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SrTiO₃ and (Ba,Sr)TiO₃ Films Epitaxially Grown on SrRuO₃ Using Atomic Layer Deposition

Published:2024-09-06 Issue: Volume: Page:
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Park Bo-Eun¹^ORCID,Lee Jaeho¹^ORCID,Bang Jeongil¹^ORCID,Do Euncheol¹^ORCID,Kim Eunsun²^ORCID,An Cheolhyun²^ORCID,Park Seong Yong¹^ORCID,Lee Sangjun¹^ORCID,Yun Dong-Jin¹^ORCID,Lee Jooho¹^ORCID,Kim Yongsung¹^ORCID,Kim Hyung-Jun¹^ORCID

Affiliation:

1. Samsung Advanced Institute of Technology, Samsung Electronics, Suwon-si, Gyeonggi-do 16678, Republic of Korea

2. Advanced Process Development Team, Semiconductor R&D Center, Samsung Electronics, Hwaseong-si, Gyeonggi-do 18448, Republic of Korea

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.4c10400

Reference38 articles.

1. High dielectric constant oxides

2. Capacitors with an Equivalent Oxide Thickness of <0.5 nm for Nanoscale Electronic Semiconductor Memory

3. Process–property relationship in high-k ALD SrTiO3 and BaTiO3: a review

4. Thickness Dependence of the Dielectric Properties of Epitaxial SrTiO3Films on (001)Pt/SrTiO3

5. Fabrication and electrical properties of (111) textured (Ba0.6Sr0.4)TiO3 film on platinized Si substrate

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