Oxygen vacancies modulating the photodetector performances in ε-Ga2O3 thin films

Author:

Li Shan12345ORCID,Yue Jianying12345,Ji Xueqiang12345,Lu Chao12345,Yan Zuyong12345,Li Peigang12345,Guo Daoyou678910ORCID,Wu Zhenping12345ORCID,Tang Weihua12345ORCID

Affiliation:

1. Laboratory of Information Functional Materials and Devices

2. School of Science

3. State Key Laboratory of Information Photonics and Optical Communications

4. Beijing University of Posts and Telecommunications

5. Beijing 100876

6. Center for Optoelectronics Materials and Devices & Key Laboratory of Optical Field Manipulation of Zhejiang Province

7. Department of Physics

8. Zhejiang Sci-Tech University

9. Hangzhou 310018

10. China

Abstract

The oxygen vacancies regulated via the lattice O atom formation/desorption process under oxidizing/reducing annealing reveal an effective modulating effect on the ε-Ga2O3 photodetector performances.

Funder

National Natural Science Foundation of China

Fundamental Research Funds for the Central Universities

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

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