A study of the step-flow growth of the PVT-grown AlN crystals by a multi-scale modeling method
Author:
Affiliation:
1. Department of Materials and Process Simulations
2. University of Bayreuth
3. D-95440 Bayreuth, Germany
4. Leibniz-Institute for crystallization (IKZ)
5. Berlin, Germany
Abstract
A multi-scale model taking into account surface reactions and material transport in vapor was developed for PVT growth of AlN.
Publisher
Royal Society of Chemistry (RSC)
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2014/CE/C4CE00175C
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