Improved crystal quality of non-polar a-plane GaN epi-layers directly grown on optimized hole-array patterned r-sapphire substrates

Author:

Wang Caiwei12345ORCID,Jiang Yang12345,Die Junhui12345,Yan Shen12345,Hu Xiaotao12345,Hu Wei12345,Ma Ziguang12345,Deng Zhen12345,Jia Haiqiang12345,Chen Hong12345

Affiliation:

1. Key Laboratory for Renewable Energy

2. Beijing Key Laboratory for New Energy Materials and Devices

3. Beijing National Laboratory for Condensed Matter Physics

4. Institute of Physics, Chinese Academy of Sciences

5. Beijing 100190

Abstract

The characteristics of a-plane GaN films directly grown on silicon dioxide (SiO2) hole-array patterned r-sapphire substrates (HPSS) were investigated in this work.

Funder

National Natural Science Foundation of China

Beijing Municipal Science and Technology Commission

Publisher

Royal Society of Chemistry (RSC)

Subject

Condensed Matter Physics,General Materials Science,General Chemistry

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