High-Performance Two-Dimensional Electronics with a Noncontact Remote Doping Method-Reference-Cited by-同舟云学术

High-Performance Two-Dimensional Electronics with a Noncontact Remote Doping Method

Published:2023-06-23 Issue:13 Volume:17 Page:12208-12215
ISSN:1936-0851
Container-title:ACS Nano
language:en
Short-container-title:ACS Nano

Author:

Ho Po-Hsun¹,Cheng Ren-Hao²,Pao Po-Heng²^ORCID,Chou Sui-An¹,Huang Yi-Hsiu²,Yang Yu-Ying²,Wu Yu-Syuan²,Su Yuan-Chun³,Mao Po-Sen³,Su Sheng-Kai¹,Chou Bo-Jhih²,Chen Edward¹,Hung Terry Y. T.¹,Li Ming-Yang¹,Cheng Chao-Ching¹,Woon Wei-Yen⁴,Liao Szuya⁴,Chang Wen-Hao³^ORCID,Chien Chao-Hsin²

Affiliation:

1. Corporate Research, Taiwan Semiconductor Manufacturing Company, Hsinchu 300, Taiwan

2. Department of Electrical Engineering, National Yang Ming Chiao Tung University, Hsinchu 300, Taiwan

3. Department of Electrophysics, National Yang Ming Chiao Tung University, Hsinchu 300, Taiwan

4. Pathfinding, Taiwan Semiconductor Manufacturing Company, Hsinchu 300, Taiwan

Funder

National Chiao Tung University

Taiwan Semiconductor Manufacturing Company

Publisher

American Chemical Society (ACS)

Subject

General Physics and Astronomy,General Engineering,General Materials Science