High-Mobility GaSb Nanostructures Cointegrated with InAs on Si
Author:
Affiliation:
1. IBM Research − Zurich, Säumerstrasse 4, 8803 Rüschlikon, Switzerland
2. Electron Microscopy Center, EMPA, Swiss Federal Laboratories for Materials Science and Technology, Überlandstrasse 129, CH-8600 Dübendorf, Switzerland
Funder
Schweizerischer Nationalfonds zur F?rderung der Wissenschaftlichen Forschung
H2020 European Research Council
Seventh Framework Programme
Publisher
American Chemical Society (ACS)
Subject
General Physics and Astronomy,General Engineering,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsnano.6b04541
Reference42 articles.
1. Advanced 3D Monolithic hybrid CMOS with Sub-50 nm gate inverters featuring replacement metal gate (RMG)-InGaAs nFETs on SiGe-OI Fin pFETs
2. CMOS-Compatible Replacement Metal Gate InGaAs-OI FinFET With $I_{ON}=156~\mu \text{A}/\mu \text{m}$ at $V_{DD}= 0.5$ V and $I_{OFF}=100$ nA/$\mu \text{m}$
3. Gate-all-around InGaAs nanowire FETS with peak transconductance of 2200μS/μm at 50nm Lg using a replacement Fin RMG flow
4. Yuan, Z.; Kumar, A.; Chen, C.Y.; Nainani, A.; Griffin, P.; Wang, A.; Wang, W.; Wong, M. H.; Droopad, R.; Contreras-Guerrero, R.; Kirsch, P.; Jammy, R.; Plummer, J.; Saraswat, K. C.Optimal Device Architecture and Hetero-Integration Scheme for III–V CMOS. InSymposium on VLSI Technology, Digest of Technical Papers, Kyoto, Japan, June 10–13, 2013;Japan Society of Applied Physics:Kyoto, Japan, 2013; ppT54–T55.
5. Hole mobility enhancement in In0.41Ga0.59Sb quantum-well field-effect transistors
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