Infrared Signatures for Phase Identification in Hafnium Oxide Thin Films

Author:

Jaszewski Samantha T.12ORCID,Calderon Sebastian3,Shrestha Bishal45,Fields Shelby S.1ORCID,Samanta Atanu6,Vega Fernando J.7,Minyard Jacob D.7,Casamento Joseph A.8,Maria Jon-Paul8,Podraza Nikolas J.45,Dickey Elizabeth C.3ORCID,Rappe Andrew M.69ORCID,Beechem Thomas E.7ORCID,Ihlefeld Jon F.110ORCID

Affiliation:

1. Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia 22904, United States

2. Sandia National Laboratories, Albuquerque, New Mexico 87185, United States

3. Department of Materials Science and Engineering, Carnegie Mellon University, Pittsburgh, Pennsylvania 15213, United States

4. Department of Physics and Astronomy, University of Toledo, Toledo, Ohio 43606, United States

5. Wright Center for Photovoltaic Innovation & Commercialization, University of Toledo, Toledo, Ohio 43606, United States

6. Department of Chemistry, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States

7. School of Mechanical Engineering and Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, United States

8. Department of Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802, United States

9. Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pennsylvania 19104, United States

10. Charles L. Brown Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, Virginia 22904, United States

Funder

Division of Graduate Education

Semiconductor Research Corporation

Sandia National Laboratories

Publisher

American Chemical Society (ACS)

Subject

General Physics and Astronomy,General Engineering,General Materials Science

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