Formation of Nanoporous Features, Flat Surfaces, or Crystallographically Oriented Etched Profiles by the Si Chemical Dry Etching Using the Reaction of F2 + NO → F + FNO at an Elevated Temperature-Reference-Cited by-同舟云学术

Formation of Nanoporous Features, Flat Surfaces, or Crystallographically Oriented Etched Profiles by the Si Chemical Dry Etching Using the Reaction of F2 + NO → F + FNO at an Elevated Temperature

Published:2013-09-27 Issue:40 Volume:117 Page:20810-20818
ISSN:1932-7447
Container-title:The Journal of Physical Chemistry C
language:en
Short-container-title:J. Phys. Chem. C

Author:

Tajima Satomi¹,Hayashi Toshio¹,Ishikawa Kenji¹,Sekine Makoto¹,Hori Masaru¹

Affiliation:

1. Plasma Nanotechnology Research Center (PLANT), Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, Aichi 464-8603, Japan

Publisher

American Chemical Society (ACS)

Subject

Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials

Link

https://pubs.acs.org/doi/pdf/10.1021/jp4084794

Reference47 articles.

1. Ion‐ and electron‐assisted gas‐surface chemistry—An important effect in plasma etching

2. Chemiluminescence and the reaction of molecular fluorine with silicon

3. Comparison of XeF2 and F‐atom reactions with Si and SiO2

4. Comparison of the Interactions of XeF2 and F2 with Si(100)(2 × 1)

5. Development of Si(100) surface roughness at the initial stage of etching in F2 and XeF2 gases: ellipsometric study

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Quasi In Situ XPS on a SiO_xF_y Layer Deposited on Silicon by a Cryogenic Process;ECS Journal of Solid State Science and Technology;2022-01-01

2. Moisture Barrier Properties of Silicone Rubber Surface Layers Fluorinated at Different Temperatures;IEEE Transactions on Dielectrics and Electrical Insulation;2021-02

3. Enhancement of DC Flashover of Liquid Silicone Rubber by Direct Fluorination;IEEE Transactions on Dielectrics and Electrical Insulation;2020-12

4. Simultaneous Improvement of Surface Properties of the Liquid Silicone Rubber by Direct Fluorination;2020 IEEE 3rd International Conference on Dielectrics (ICD);2020-07-05

5. Improved Moisture Barrier Properties of High Temperature Vulcanized Silicone Rubber by Direct Fluorination;2020 IEEE 3rd International Conference on Dielectrics (ICD);2020-07-05