Comparison of the Interactions of XeF2 and F2 with Si(100)(2 × 1)
Author:
Affiliation:
1. Department of Chemistry, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Surfaces, Coatings and Films,Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/jp020936p
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1. Bistable microelectrothermal actuator in a standard complementary metal-oxide-semiconductor process
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