Overcoming Low Ge Ionization and Erosion Rate Variation for Quantitative Ultralow Energy Secondary Ion Mass Spectrometry Depth Profiles of Si1–xGex/Ge Quantum Well Structures-Reference-Cited by-同舟云学术

Overcoming Low Ge Ionization and Erosion Rate Variation for Quantitative Ultralow Energy Secondary Ion Mass Spectrometry Depth Profiles of Si1–xGex/Ge Quantum Well Structures

Published:2012-02-24 Issue:5 Volume:84 Page:2292-2298
ISSN:0003-2700
Container-title:Analytical Chemistry
language:en
Short-container-title:Anal. Chem.

Author:

Morris Richard J. H.¹,Dowsett Mark G.¹,Beanland Richard¹,Dobbie Andrew¹,Myronov Maksym¹,Leadley David R.¹

Affiliation:

1. Department of Physics, University of Warwick, Gibbet Hill Road, Coventry, CV4 7AL, U.K.

Publisher

American Chemical Society (ACS)

Subject

Analytical Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/ac202929x

Reference24 articles.

1. The sputtering process and sputtered ion emission

2. Recoil mixing in solids by energetic ion beams

3. The complex formation of ripples during depth profiling of Si with low energy, grazing oxygen beams

4. Periodicity of impurity segregation effects in oxygen bombarded silicon

5. Metal penetration and dopant redistribution beneath alloyed Ohmic contacts to n‐GaAs

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. An O2+ probe energy study for boron quantification in Si1−Ge (0 ≤x≤ 1) using secondary ion mass spectrometry;Applied Surface Science;2016-12

2. Si1-xGex/Si Interface Profiles Measured to Sub-Nanometer Precision Using uleSIMS Energy Sequencing;Journal of the American Society for Mass Spectrometry;2016-07-21

3. Ultra high hole mobilities in a pure strained Ge quantum well;Thin Solid Films;2014-04

4. New RP-CVD grown ultra-high performance selectively B-doped pure-Ge 20 nm QWs on (100)Si as basis material for post-Si CMOS technology;physica status solidi (c);2013-12-09

5. Ultra-high hole mobility exceeding one million in a strained germanium quantum well;Applied Physics Letters;2012-10-22