Ionic Liquids as Additives to Polystyrene-Block-Poly(Methyl Methacrylate) Enabling Directed Self-Assembly of Patterns with Sub-10 nm Features

Author:

Chen Xuanxuan12ORCID,Zhou Chun1,Chen Shuang-Jun3,Craig Gordon S. W.1,Rincon-Delgadillo Paulina2,Dazai Takahiro4,Miyagi Ken4,Maehashi Takaya4,Yamazaki Akiyoshi4,Gronheid Roel2,Stoykovich Mark P.1,Nealey Paul F.15ORCID

Affiliation:

1. Institute for Molecular Engineering, University of Chicago, 5640 S Ellis Avenue, Chicago, Illinois 60637, United States

2. IMEC, Kapeldreef 75, Leuven B-3001, Belgium

3. College of Materials Science and Engineering, Nanjing University of Technology, 5 Xin Mo Fan Road, Nanjing, Jiangsu 210009, China

4. Tokyo Ohka Kogyo, 1590 Tabata, Samukawa-Machi, Koza-Gun, Kanagawa 253-0114, Japan

5. Material Science Division, Argonne National Laboratory, 9700 South Cass Avenue, Lemont, Illinois 60439, United States

Funder

National Natural Science Foundation of China

National Science Foundation

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

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