High Mobility Flexible Amorphous IGZO Thin-Film Transistors with a Low Thermal Budget Ultra-Violet Pulsed Light Process
Author:
Affiliation:
1. University Grenoble Alpes, CEA, F-38000 Grenoble, France
2. Merck TU-Darmstadt Laboratories, 64287 Darmstadt, Germany
3. Institute for Electronics Microelectronics and Nanotechnology, University of Lille, CNRS, 59652 Villeneuve d’Ascq, France
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.6b09990
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