1. Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands
2. Oxford Instruments
Plasma Technology, North End, Bristol BS49 4AP, U.K.
3. Air Products and Chemicals Inc., 1969
Palomar Oaks Way, Carlsbad, California 92011, United States
4. Lam Research Corporation, 11155 Southwest Leveton Drive, Tualatin, Oregon 97062, United States