Affiliation:
1. School of Chemical & Biomolecular Engineering and ‡Department of Materials Science & Engineering, Cornell University, Ithaca, New York 14853, United States
Funder
National Science Foundation
Semiconductor Research Corporation
Publisher
American Chemical Society (ACS)
Subject
Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials
Reference49 articles.
1. Low Dielectric Constant Materials
2. Interconnect Summary. In The International Technology Roadmap for Semiconductors [Online], 2013 Edition, 1-3
3. http://www.itrs.net/ITRS%201999-2014%20Mtgs,%20Presentations%20&%20Links/2013ITRS/2013Chapters/2013Interconnect_Summary.pdf (accessed March 23, 2015).
4. In Search of Low-
k
Dielectrics
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献