In Search of Low- k Dielectrics-Reference-Cited by-同舟云学术

In Search of Low- k Dielectrics

Published:1999-10-15 Issue:5439 Volume:286 Page:421-423
ISSN:0036-8075
Container-title:Science
language:en
Short-container-title:Science

Author:

Miller Robert D.¹

Affiliation:

1. The author is at IBM Research Division, Almaden Research Center, San Jose, CA 95120-6099, USA.

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

Reference16 articles.

1. Wilson S. R., et al., Handbook of Multilevel Metallization for Integrated Circuits,, Wilson S. R., Tracy C. J., Freeman J. L. Eds., (Noyes, Park Ridge, NJ, 1993)chap. 1.

2. Edelstein D., et al., Tech. Dig.376 (1997).

3. Chap. 4 in (1); P. Balk J. Non-Cryst. Solids 187 1 1995; J. Baliga Semiconductor International (June 1998 p. 139.

4. Ptfe Nanoemulsions as Spin-On, Low Dielectric Constant Materials For Ulsi Applications

5. Dielectric properties of aerogels

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