Generating amorphous SiOC:H Structure: A novel Unit-Cell algorithm and its application in low-k porous material simulations
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Published:2024-06
Issue:
Volume:242
Page:113093
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ISSN:0927-0256
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Container-title:Computational Materials Science
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language:en
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Short-container-title:Computational Materials Science
Author:
Yang HuiORCID,
Chen YingqianORCID,
Wah Wong MingORCID
Funder
Applied Materials
A*STAR
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