Sequential Infiltration Synthesis of Electronic Materials: Group 13 Oxides via Metal Alkyl Precursors
Author:
Affiliation:
1. Pritzker School of Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States
2. Advanced Materials for Energy-Water Systems (AMEWS) Energy Frontier Research Center (EFRC), Lemont, Illinois 60439, United States
Funder
Basic Energy Sciences
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.9b01714
Reference70 articles.
1. Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition
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4. Synthesis of a Novel Porous Polymer/Ceramic Composite Material by Low-Temperature Atomic Layer Deposition
5. Nanoscopic Morphologies in Block Copolymer Nanorods as Templates for Atomic-Layer Deposition of Semiconductors
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