Revealing the Chemical Interactions between PMMA and TMA for Insights into Sequential Infiltration Synthesis-Reference-Cited by-同舟云学术

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Revealing the Chemical Interactions between PMMA and TMA for Insights into Sequential Infiltration Synthesis

Published:2024-09-09 Issue: Volume: Page:
ISSN:0024-9297
Container-title:Macromolecules
language:en
Short-container-title:Macromolecules

Author:

McCallum Francis¹,Hossain Md. Daloar¹,Blakey Idriss¹²^ORCID,Peng Hui¹^ORCID,Whittaker Andrew K.¹³^ORCID

Affiliation:

1. Australian Institute for Bioengineering and Nanotechnology, The University of Queensland, Brisbane, Queensland 4072, Australia

2. Centre for Advanced Imaging, The University of Queensland, Brisbane, Queensland 4072, Australia

3. ARC Centre of Excellence for Green Electrochemical Transformation of Carbon Dioxide, The University of Queensland, Brisbane, Queensland 4072, Australia

Funder

Australian Research Council

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.macromol.4c01345

Reference45 articles.

1. Trends in photoresist materials for extreme ultraviolet lithography: A review

2. Review of recent advances in inorganic photoresists

3. The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective

4. The ECW Model

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