The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective-Reference-Cited by-同舟云学术

The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective

Published:2019-11-21 Issue:19 Volume:151 Page:190901
ISSN:0021-9606
Container-title:The Journal of Chemical Physics
language:en
Short-container-title:J. Chem. Phys.

Author:

Waldman Ruben Z.¹²³^ORCID,Mandia David J.⁴^ORCID,Yanguas-Gil Angel⁴^ORCID,Martinson Alex B. F.³⁵^ORCID,Elam Jeffrey W.³⁴⁶^ORCID,Darling Seth B.¹²³⁶^ORCID

Affiliation:

1. Pritzker School of Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, USA

2. Chemical Sciences and Engineering Division, Argonne National Laboratory, Lemont, Illinois 60439, USA

3. Advanced Materials for Energy-Water Systems (AMEWS) Energy Frontier Research Center (EFRC), Lemont, Illinois 60439, USA

4. Applied Materials Division, Argonne National Laboratory, Lemont, Illinois 60439, USA

5. Materials Science Division, Argonne National Laboratory, Lemont, Illinois 60439, USA

6. Center for Molecular Engineering, Argonne National Laboratory, Lemont, Illinois 60439, USA

Funder

U.S. Department of Energy

Publisher

AIP Publishing

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Link

http://aip.scitation.org/doi/am-pdf/10.1063/1.5128108

Reference136 articles.

1. Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers

2. Vapor phase infiltration (VPI) for transforming polymers into organic–inorganic hybrid materials: a critical review of current progress and future challenges

3. Area selective atomic layer deposition of titanium dioxide: Effect of precursor chemistry

4. Transport behavior of atomic layer deposition precursors through polymer masking layers: Influence on area selective atomic layer deposition

5. Recent progress of atomic layer deposition on polymeric materials

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