Sequential Infiltration Synthesis of Al<sub>2</sub>O<sub>3</sub> in PMMA Thin Films: Temperature Investigation by Operando Spectroscopic Ellipsometry-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Sequential Infiltration Synthesis of Al₂O₃ in PMMA Thin Films: Temperature Investigation by Operando Spectroscopic Ellipsometry

Published:2024-06-28 Issue:27 Volume:16 Page:35825-35833
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Motta Alessia¹²^ORCID,Seguini Gabriele¹^ORCID,Wiemer Claudia¹,Perego Michele¹^ORCID

Affiliation:

1. Unit of Agrate Brianza, CNR-IMM, Via C. Olivetti 2, I-20864 Agrate Brianza, Italy

2. Dipartimento di Energia, Politecnico di Milano, Via Ponzio 34/3, 20133 Milano, Italy

Funder

European Regional Development Fund

Publisher

American Chemical Society (ACS)

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.4c06887

Reference34 articles.

1. The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective

2. Vapor phase infiltration (VPI) for transforming polymers into organic–inorganic hybrid materials: a critical review of current progress and future challenges

3. Mechanical Behavior of Hybrid Thin Films Fabricated by Sequential Infiltration Synthesis in Water-Rich Environment

4. Unraveling the ultrahigh modulus of resilience of Core-Shell SU-8 nanocomposite nanopillars fabricated by vapor-phase infiltration

5. Elemental depth profiles and plasma etching rates of positive-tone electron beam resists after sequential infiltration synthesis of alumina

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP