Epitaxial Growth of β-Ga<sub>2</sub>O<sub>3</sub> Thin Films on Si with YSZ Buffer Layer-Reference-Cited by-同舟云学术

Epitaxial Growth of β-Ga₂O₃ Thin Films on Si with YSZ Buffer Layer

Published:2022-11-24 Issue:48 Volume:7 Page:43603-43608
ISSN:2470-1343
Container-title:ACS Omega
language:en
Short-container-title:ACS Omega

Author:

Choi Hyung-Jin¹,Lee Jun Young¹,Jung Soo Young¹²,Ning Ruiguang¹³,Kim Min-Seok¹⁴,Jung Sung-Jin¹,Won Sung Ok⁵,Baek Seung-Hyub¹³⁶⁷,Jang Ji-Soo¹^ORCID

Affiliation:

1. Electronic Materials Research Center, Korea Institute of Science and Technology, Seoul 02792, Republic of Korea

2. Department of Materials Science and Engineering, Seoul National University (SNU), Seoul 08826, Republic of Korea

3. Division of Nano & Information Technology, KIST School, Korea University of Science and Technology, Seoul 02792, Republic of Korea

4. Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University, Seoul 08826, Republic of Korea

5. Advanced Analysis Center, Korea Institute of Science and Technology, Seoul 02792, Republic of Korea

6. Department of Materials Science and Engineering, Yonsei University, Seoul 03722, Republic of Korea

7. Yonsei-KIST Convergence Research Institute, Korea Institute of Science and Technology, Seoul 02792, Republic of Korea

Funder

National Research Foundation of Korea

Ministry of Trade, Industry and Energy

Publisher

American Chemical Society (ACS)

Subject

General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acsomega.2c04387

Reference26 articles.

1. A review of Ga2O3materials, processing, and devices

2. Recent advances in the growth of gallium oxide thin films employing various growth techniques—a review

3. Growth and characterization of α-, β-, and ϵ-phases of Ga2O3 using MOCVD and HVPE techniques

4. Highly conductive homoepitaxial Si-doped Ga2O3 films on (010) β-Ga2O3 by pulsed laser deposition

5. Toward controlling the carrier density of Si doped Ga2O3 films by pulsed laser deposition

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