Improved Ga2O3 films on variously oriented Si substrates with Al2O3 or HfO2 buffer layer via atomic layer deposition
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Published:2024-09
Issue:
Volume:193
Page:207925
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ISSN:2773-0123
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Container-title:Micro and Nanostructures
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language:en
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Short-container-title:Micro and Nanostructures
Author:
Liu XiangtaiORCID,
Wang Jiayang,
Xu Zhitian,
Wang Shaoqing,
Jia Yifan,
Lu Qin,
Wang Zhan,
Guan Yunhe,
Li Lijun,
Chen Haifeng