Measuring the Structure of Epitaxially Assembled Block Copolymer Domains with Soft X-ray Diffraction-Reference-Cited by-同舟云学术

Measuring the Structure of Epitaxially Assembled Block Copolymer Domains with Soft X-ray Diffraction

Author:

Stein Gila E.¹,Liddle J. Alexander¹,Aquila Andrew L.²,Gullikson Eric M.³

Affiliation:

1. Center for Nanoscale Science and Technology, National Institute of Standards and Technology, Gaithersburg, Maryland 20899

2. Applied Science and Technology Graduate Group, University of California, Berkeley, California 94720

3. Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Inorganic Chemistry,Polymers and Plastics,Organic Chemistry

Link

Reference42 articles.

1. International technology roadmap for semiconductors; Technical Report, 2007, (See sections titled Lithography and Emerging Reseach Materials).

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