Density-Functional Theory Molecular Dynamics Simulations and Experimental Characterization of a-Al2O3/SiGe Interfaces

Author:

Chagarov Evgueni1,Sardashti Kasra1,Kaufman-Osborn Tobin2,Madisetti Shailesh3,Oktyabrsky Serge4,Sahu Bhagawan3,Kummel Andrew1

Affiliation:

1. Department of Chemistry and Biochemistry, University of California, San Diego, La Jolla, California 92093, United States

2. Applied Materials, Santa Clara, California 95054, United States

3. GlobalFoundries, Malta, New York 12020, United States

4. Department of Nanoscale Science and Engineering, University at Albany−State University of New York, Albany, New York 12222, United States

Funder

Semiconductor Research Corporation

Division of Materials Research

Applied Materials

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

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