Methodology for Studying Surface Chemistry and Evolution during the Nucleation Phase of Atomic Layer Deposition Using Scanning Tunneling Microscopy-Reference-Cited by-同舟云学术

Methodology for Studying Surface Chemistry and Evolution during the Nucleation Phase of Atomic Layer Deposition Using Scanning Tunneling Microscopy

Author:

Thian Dickson¹^ORCID,Yemane Yonas T.¹^ORCID,Xu Shicheng²,Prinz Fritz B.²³

Affiliation:

1. Department of Applied Physics, Stanford University, Stanford, California 94305, United States

2. Department of Mechanical Engineering, Stanford University, Stanford, California 94305, United States

3. Department of Materials Science and Engineering, Stanford University, Stanford, California 94305, United States

Funder

Ford Foundation

Agency for Science, Technology and Research

Basic Energy Sciences

Stanford University

Division of Electrical, Communications and Cyber Systems

Publisher

American Chemical Society (ACS)

Subject

Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials

Link

Reference78 articles.

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