New Insight into the Mechanism of Sequential Infiltration Synthesis from Infrared Spectroscopy
Author:
Affiliation:
1. Institute for Molecular Engineering, University of Chicago, Chicago, Illinois 60637, United States
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm502427q
Reference29 articles.
1. Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers
2. A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates
3. Block Copolymer Nanostructures for Technology
4. Enhanced polymeric lithography resists via sequential infiltration synthesis
5. Etch properties of resists modified by sequential infiltration synthesis
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