Thermo-Optical Properties of Thin-Film TiO2–Al2O3 Bilayers Fabricated by Atomic Layer Deposition
Author:
Publisher
MDPI AG
Subject
General Materials Science,General Chemical Engineering
Link
http://www.mdpi.com/2079-4991/5/2/792/pdf
Reference23 articles.
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2. Atomic layer deposition: An overview;George;Chem Rev,2010
3. Low-temperature atomic layer deposition of TiO2, Al2O3, and ZnO thin films;Nam;J Kr Phys Soc,2011
4. Effect of water dose on atomic layer deposition rate of oxide thin films;Matero;Thin Solid Films,2000
5. Advanced ALE processes of amorphous and polycrystalline films;Ritala;Appl Surf Sci,1997
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