Low-temperature Atomic Layer Deposition of TiO2, Al2O3, and ZnO Thin Films
Author:
Publisher
Korean Physical Society
Subject
General Physics and Astronomy
Cited by 60 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
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