Micromechanical Characterization of Polysilicon Films through On-Chip Tests
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Link
http://www.mdpi.com/1424-8220/16/8/1191/pdf
Reference53 articles.
1. A review onin situstiffness adjustment methods in MEMS
2. Effect of specimen size on Young's modulus and fracture strength of polysilicon
3. New On-Chip Nanomechanical Testing Laboratory - Applications to Aluminum and Polysilicon Thin Films
4. Elastic Properties and Representative Volume Element of Polycrystalline Silicon for MEMS
5. OVERALL ELASTIC PROPERTIES OF POLYSILICON FILMS: A STATISTICAL INVESTIGATION OF THE EFFECTS OF POLYCRYSTAL MORPHOLOGY
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