Effect of specimen size on Young's modulus and fracture strength of polysilicon-Reference-Cited by-同舟云学术

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Effect of specimen size on Young's modulus and fracture strength of polysilicon

Published:2001 Issue:3 Volume:10 Page:317-326
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Sharpe W.N.,Jackson K.M.,Hemker K.J.,Xie Z.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/20498/00946774.pdf?arnumber=946774

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