Design of micromachines under uncertainty with the sample-average approximation method
Author:
Affiliation:
1. Fraunhofer IPMS
2. Chair of Micro and Nano Systems, Brandenburg University of Technology Cottbus-Senftenberg
Publisher
Japan Society of Mechanical Engineers
Link
https://www.jstage.jst.go.jp/article/jamdsm/18/2/18_2024jamdsm0018/_pdf
Reference20 articles.
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2. Beranek, L. L., Acoustics (1993), pp. 91-108, Acoustical Society of America.
3. Colette, Y., Hansen, N., Pujol, G., Salazar Aponte, D. and Le Riche, R., Object-oriented programming of optimizers — examples in Scilab, in Breitkopf, P. and Coelho, R. J. (eds.), Multidisciplinary Design Optimization in Computational Mechanics (2013), pp. 499-538, Wiley, DOI: 10.1002/9781118600153.ch14.
4. Díaz, J. O., A feature-to-wafer-scale model of etch-rate non-uniformity in deep reactive ion etching, M. S. Thesis, Massachusetts Institute of Technology (2010).
5. Dornfeld, D. A. and Lee, D.-E., Precision Manufacturing (2010), pp. 1-7, Springer-Verlag.
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