Optimization of the Geometry of a Microelectromechanical System Testing Device for SiO2—Polysilicon Interface Characterization
Author:
Affiliation:
1. Dipartimento di Ingegneria Civile e Ambientale, Politecnico di Milano, Piazza Leonardo da Vinci, 32, 20133 Milano, Italy
2. STMicroelectronics, 20007 Cornaredo, Italy
Publisher
MDPI
Link
https://www.mdpi.com/2673-4591/58/1/82/pdf
Reference40 articles.
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2. Mechanical reliability of silicon microstructures;Tsuchiya;J. Micromech. Microeng.,2021
3. Younis, M.I. (2011). MEMS Linear and Nonlinear Statics and Dynamics, Springer. [1st ed.].
4. Gad-el-Hak, M., and Seemann, W. (2002). MEMS Handbook, CRC Press. [1st ed.].
5. Corigliano, A., Ardito, R., Comi, C., Frangi, A., Ghisi, A., and Mariani, S. (2018). Mechanics of Microsystems, Wiley. [1st ed.].
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