Advances in Multiphysics Simulation and Experimental Testing of Mems
Author:
Affiliation:
1. Politecnico di MilanoItaly
2. Cornell UniversityUSA
3. University of Illinois at Urbana ChampaignUSA
Publisher
PUBLISHED BY IMPERIAL COLLEGE PRESS AND DISTRIBUTED BY WORLD SCIENTIFIC PUBLISHING CO.
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Optimization of the Geometry of a Microelectromechanical System Testing Device for SiO2—Polysilicon Interface Characterization;ECSA 2023;2023-11-15
2. Fractal roughness effects on nanoscale grinding;Applied Surface Science;2019-02
3. Stochastic Methods in Microsystems Engineering;Stochastic Methods for Estimation and Problem Solving in Engineering;2018
4. Nonequilibrium dynamics of an ultracold dipolar gas;Physical Review A;2015-01-23
5. High-order theory for arched structures and its application for the study of the electrostatically actuated MEMS devices;Archive of Applied Mechanics;2014-04-09
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