Elastic Properties and Representative Volume Element of Polycrystalline Silicon for MEMS
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,Aerospace Engineering
Link
http://link.springer.com/content/pdf/10.1007/s11340-006-0405-7.pdf
Reference26 articles.
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4. Vlassak JJ, Nix WD (1992) A new bulge test technique for the determination of Young’s modulus and Poisson’s ratio of thin films. J Mater Res 7(12):3242–3249.
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