Nonlinear Dynamic Behavior of a Bi-Axial Torsional MEMS Mirror with Sidewall Electrodes
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Link
http://www.mdpi.com/2072-666X/7/3/42/pdf
Reference24 articles.
1. High-Q MEMS Resonators for Laser Beam Scanning Displays
2. Scanning Micromirror Platform Based on MEMS Technology for Medical Application
3. Linearization of electrostatically actuated surface micromachined 2-D optical scanner
4. Analytical modeling of bending effect on the torsional response of electrostatically actuated micromirrors
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