Design of electrostatic actuated MEMS biaxial scanning micro-mirror with serpentine structure

Author:

Sadhukhan Dhrubajyoti,Prasad Singh Gajendra

Publisher

Elsevier BV

Subject

General Medicine

Reference29 articles.

1. A design methodology for a bulk-micromachined two-dimensional electrostatic torsion micromirror;Hao;J. Microelectromech. Syst.,2003

2. Designing MEMS for manufacturing;Wolter;Optomech. Micro/Nano Components, Devices, Syst.,2004

3. Kardak, Ajay Ashok, Prasant Kumar Patnaik, Tangellapalli Srinivas, N. B. and A. S. - 1-Design and Analysis of the performance of a Torsional Micromirror for an Optical switching system | Semantic Scholar. https://www.semanticscholar.org/paper/1-Design-and-Analysis-of-the-performance-of-a-for-Kardak-Patnaik/77767e273bcd458e38a5e8289f059c6d5232e67b.

4. Light-drive biomedical micro-tools and biochemical IC chips fabricated by 3D micro/nano stereolithography;Ikuta;Optomech. Micro/Nano Components, Devices, Syst.,2004

5. MEMS-based medical endomicroscopes;Qiu;IEEE J. Sel. Top. Quantum Electron.,2015

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